Photoresist, also known as photoresist, refers to a corrosion-resistant film material that undergoes changes in solubility due to irradiation or radiation by ultraviolet light, electron beam , ion beam, X-ray, etc. Photoresist is composed of sensitizers (photoinitiators), photosensitive resins (polymerizers), solvents, and additives. In the manufacturing process of integrated circuits, photolithography accounts for approximately 35% of the entire chip manufacturing cost, and is the most core process in semiconductor manufacturing. The materials involved include various solvents, acids, bases, high-purity organic reagents, high-purity gases, etc. Among all reagents, photoresist has the highest technical requirements. Therefore, the detection of the entire photoresist industry chain process is very important.
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